Semiconductor Manufacturing

Kaydon offers solutions for the application of precision bearings in silicon chip manufacturing processes. From robotics to mechanical polishing machines to lithography equipment, Kaydon Reali-Slim® thin section bearings provide space-saving designs for smaller, lighter, and simpler rotating devices.

Kaydon Reali-Slim® bearings can be customized to maintain the highest operational precision and performance while reducing friction, resisting contamination, and preventing corrosion. Special materials and lubricants allow operation at temperatures above 250°C, in vacuums ranging from 10-8 to 10-12 Torr, or in corrosive chemical environments. Hybrid (ceramic rolling elements) bearing designs can optimize torque characteristics and extend service life.
 

 



Applications

• Inspection Equipment
• Wafer Probing
• Wafer Transfer System
• Dispensing
• Pick and Place Robots
• Measurement Systems
• Test Heads
• Positioners
• Dicing Equipment
• Grinding Equipment
• Vacuum Deposition Systems
• Wafer Steppers
• Probe Stations
• Wafer Trimmers
• Wafer Washers
• Wafer Polishers
• Thin Film Deposition Systems
• Chemical Vapor Deposition Systems
• Etching Systems
• Mechanical Polishers
• Atmospheric and Vacuum Transfer
• Robots
• Test Heads
• Manipulators
• Ultrasonic Cleaning Systems
• Spin Dryers
• Lithography
• Mechanical Polishers
• Surface Mounting Machines

 
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